D. レーザープロセシング

Autor: M. Murahara, M. Tomita, T. Ikegame, S. Itoh, K. Hatao, Itsuo Nagata, H. Niino, A. Yabe, J. Krager, W. Kaütek, M. YODA, N. MUKAI, M. KIMURA, S. OKADA, T. KONAGAI, N. HAYASHIA, H. HOZUMI, H. IGAKURA, Y. TOGASAWA, M. OCHIAI, J. SENBOSHI, M. KIKUNAGA, K. SATO, M. OBATA, K. ASANO, S. NAKAYAMA, Y. SANO, H. TAKAHASHI, T. Mori, M. Motizuki, K. Nakada, T. Okamoto, T. Suzuki, T. Ueda, T. Makimura, K. Murakami, Taro Ninomiya, Toshiaki Monnaka, Narumi Inoue, Shigeru Kashiwabara, T. Sato, T. Kadomura, D. Watanabe, H. Okado, K. Toyoda, S. Nakajima, S. Kondo, J. Morimoto, N. Toshima, T. Kumita, T. Hashizume, K. Makino, T. Mizuta, S. Tokunaga, S. Yoshihara, J. Kawanaka, J. Yokotani, K. Kurosawa, S. Kubodera, W. Sasaki, Jie Zhang, Koji Sugioka, Satoshi Wada, Hideo Tashiro, Koichi Toyoda, Takahisa Itsuno, Katsumi Midorikawa, Y P Kathuria

Publikováno v: The Review of Laser Engineering. 26:115-124,129

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fced77403e57fdb6f49583c05dc48113
https://doi.org/10.2184/lsj.26.supplement_115

Comparison of Ta2O5 Thin Films Deposited by 'Off-axis' and 'On-axis' Pulsed Laser Deposition Technique

Autor: Taro Ninomiya, Narumi Inoue, Shigeru Kashiwabara

Publikováno v: Japanese Journal of Applied Physics. 39:2756

The crystalline properties of Ta2O5 thin films deposited by an off-axis aperture-installation-type pulsed laser deposition (PLD) technique are investigated and the results are compared to those of films deposited by the conventional on-axis technique

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1c0308e7cf113c8ac8bec447cd35bcd9
https://doi.org/10.1143/jjap.39.2756