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pro vyhledávání: '"Tariq M. Haniff"'
Autor:
David A. Maginnis, Charles Blaha, William H. Fissell, Benjamin W. Chui, Nathan Wright, Tariq M. Haniff, Jimmy Ly, Shuvo Roy
Publikováno v:
Journal of Microelectromechanical Systems. 29:762-768
Silicon nanoporous membranes provide the fundamental underlying technology for the development of an implantable bio-artificial kidney. These membranes, which are comprised of micromachined slit-pores that are nominally 10 nm wide, allow for high-eff
Publikováno v:
SPIE Proceedings.
In this paper we describe a prototype self-aligning spatial filter (SASF). We present studies of the design and the results of fabrication prior to the final processing step. The SASF consists of an electrostatically actuated platform on which an opt