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pro vyhledávání: '"Takuzo Tabata"'
Autor:
Takuzo Tabata, Shintaro Miyazawa
Publikováno v:
Journal of Crystal Growth. 191:512-516
A substantial phase diagram in the hypo-peritectic region of Bi12TiO20 (BTO) was evaluated experimentally from lattice constant measurements of both BTO in ceramics with different TiO2 contents and single crystals grown from different Bi2O3-rich solu
Autor:
Okada Ikuo, Takuzo Tabata, Hitoshi Noguchi, Kumiko Iwamoto, Kurihara Kenji, Hiroki Iriguchi, Motoyoshi Akira, Hideo Yoshihara, Susumu Takahashi
Publikováno v:
SPIE Proceedings.
Stencil masks for electron-beam projection lithography (EPL), in particular, for low-energy electron beam proximity projection lithography (LEEPL), have been developed using diamond membrane. The diamond membrane gives the masks high rigidity and hig