Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Takumi Hokama"'
Autor:
Krzysztof Moorthi, Takahito Ono, Md. Mahabub Hossain, Takumi Hokama, Mai Yamazaki, Masaya Toda
Publikováno v:
IEEE Sensors Letters. 3:1-4
This article presents the design and fabrication process of a highly miniaturized nanomechanical Si-polymer composite membrane-type internal-stress sensor (MIS) with piezoresistive elements for humidity detection. The 500-μm2 area dimension sensor c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08c0d9b240c31ba1f29861d3dc51f56d
https://doi.org/10.1109/lsens.2019.2893298
https://doi.org/10.1109/lsens.2019.2893298
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
This paper reports a nanomechanical gas sensor using stress concentration at a piezoresistor. The sensor consist of a functional polymer embedded into Si comb and a Si cantilever with the piezoresistor at the support. The composite membrane generates
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::96dc13ddf79f0e8ab763a7e415d40d2c
https://doi.org/10.1109/transducers.2019.8808616
https://doi.org/10.1109/transducers.2019.8808616
Publikováno v:
Sensors and Actuators B: Chemical. 333:129524
This paper reports a piezoresistive gas sensor, which detects the stress of polymer swollen due to sorption of trace gas molecules. The sensor consists of a Si-polymer composite and a Si cantilever with a piezoresistor at the support. The stress is t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3502882f9f6e5aae632b6d402101fee8
https://doi.org/10.1016/j.snb.2021.129524
https://doi.org/10.1016/j.snb.2021.129524
Publikováno v:
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
Pillars formed by metal assisted chemical etching (MACE) process as a post process on a silicon cantilever are presented in this work. Although the cantilever is very fragile, the patterning of the pillar structures on the cantilever have been succes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a739ec4e0125acf840c404b15e23a1d1
https://doi.org/10.1109/memsys.2017.7863639
https://doi.org/10.1109/memsys.2017.7863639
Publikováno v:
Advanced Engineering Materials. 19:1700203
This work reports the patterning silicon pillars by metal-assisted chemical etching (MACE) process as a post process on a silicon cantilever for a moisture detection. Although the cantilever is very fragile, the patterning of the pillar structures on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f4314e939975622c565f731638c13439
https://doi.org/10.1002/adem.201700203
https://doi.org/10.1002/adem.201700203
Publikováno v:
The Proceedings of Conference of Tohoku Branch. :164
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b34f7792c4f0905013f85901605fe70
https://doi.org/10.1299/jsmeth.2017.52.164
https://doi.org/10.1299/jsmeth.2017.52.164