Zobrazeno 1 - 2
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pro vyhledávání: '"Takeshi Muneishi"'
Autor:
Takeshi Muneishi, Yoshiro Tomikawa
Publikováno v:
Japanese Journal of Applied Physics. 43:6728
We propose a new structure of an ultrasonic linear motor in order to solve the problems of high-power ultrasonic linear motors that drive the X Y-stage for electron beam equipment and to expand the application fields of the motor. We pay special atte
Publikováno v:
Japanese Journal of Applied Physics. 43:4012
An active orientation head was designed and installed into a step-and-repeat photo-nanoimprint system. The characteristics of the passive part of the active orientation head and compliant contact function as a basic function were evaluated. Feedback