Zobrazeno 1 - 10
of 38
pro vyhledávání: '"Takenori Osada"'
Autor:
Takeshi Aoki, Noboru Fukuhara, Takenori Osada, Hiroyuki Sazawa, Masahiko Hata, Takayuki Inoue
Publikováno v:
AIP Advances, Vol 5, Iss 8, Pp 087149-087149-14 (2015)
This paper presents a compressive study on the fabrication and optimization of GaAs metal–oxide–semiconductor (MOS) structures comprising a Al2O3 gate oxide, deposited via atomic layer deposition (ALD), with an AlN interfacial passivation layer p
Externí odkaz:
https://doaj.org/article/a0fb5547d0584824b327835b70c42ec1
Autor:
Noboru Fukuhara, Fumimasa Horikiri, Taiki Yamamoto, Takenori Osada, Kenji Kasahara, Takayuki Inoue, Takashi Egawa
Publikováno v:
Journal of Applied Physics. 133:085702
The frequency dispersion in admittance measurements in AlGaN/GaN high-electron-mobility transistors, which is typically interpreted to result from an interface trap density Dit, is also known to be caused by effects other than Dit. To study the origi
Publikováno v:
Applied Physics Letters. 121:092901
Potassium sodium niobate [(K,Na)NbO3, KNN] films are promising lead-free piezoelectric materials for microelectromechanical systems (MEMS) devices. We previously developed technologies for forming high-quality KNN films by sputtering, which showed ex
Autor:
Yuichi Hiroyama, Tomoyuki Takada, Takashi Egawa, Keitaro Ikejiri, Takenori Osada, Chihiro Hirooka, Kasahara Kenji, Mitsuhiro Tanaka
Publikováno v:
Semiconductor Science and Technology. 36:014004
Mass production-ready technologies of AlGaN/AlN/GaN high-electron-mobility transistor (HEMT) structures on 200 mm diameter silicon substrates are developed using a large-scale metal-organic chemical vapor deposition system. High-yield epitaxial subst
Autor:
Rui Zhang, Tatsuro Maeda, Shinichi Takagi, Xiao Yu, Masahiko Hata, Takenori Osada, Mitsuru Takenaka, Jian Kang, Taro Itatani
Publikováno v:
ECS Solid State Letters. 4:P15-P18
Publikováno v:
Thin Solid Films. 557:342-345
We have characterized photonic-wire waveguides with Si/SiGe/Si heterostructure ribs for Si-based optical modulators. The Si (80 nm)/Si0.72Ge0.28 (40 nm) layers grown on Si-on-insulator by molecular beam epitaxy for optical modulators were evaluated b
Autor:
Osamu Ichikawa, Takenori Osada, Shinichi Takagi, Masahiko Hata, Ryosho Nakane, Masafumi Yokoyama, Mitsuru Takenaka, Sanghyeon Kim
Publikováno v:
IEEE Transactions on Electron Devices. 60:3342-3350
We have systematically analyzed the components of source/drain (S/D) resistance (RSD) in InGaAs n-MOSFETs with Ni-InGaAs metal S/D. It is found that Ni-InGaAs has a low resistivity of ~250 μΩ·cm in a thickness of Ni-InGaAs (TNi-InGaAs) of down to
Autor:
Tatsuro Maeda, Masahiko Hata, Takeshi Aoki, Taketsugu Yamamoto, Hiroyuki Ishii, Osamu Ichikawa, Takenori Osada, Eiko Mieda, Tomoyuki Takada, Wipakorn Jevasuwan, Tetsuji Yasuda, Taro Itatani, Yuichi Kurashima, Hideki Takagi
Publikováno v:
Microelectronic Engineering. 109:133-136
We have developed the transfer technology of thin post-silicon materials by utilizing high quality heteroepitaxial growth. The single crystal Germanium layer transfer with epitaxial lift-off (ELO) technique on arbitrary substrates has been demonstrat
Publikováno v:
Microelectronic Engineering. 109:266-269
Al2O3 interlayer with plasma post-nitridation can reduce Dit of HfO2/Al2O3/SiGe.Dit toward valance band is decreased by this method, compared with HfO2/SiGe MOS.There is an universal relationship between the Dit and ΔEOT by post-nitridation.0.28-nm
Autor:
Takenori Osada, Mitsuru Takenaka, Yuki Ikku, Shinichi Takagi, Yongpeng Cheng, Masahiko Hata, Osamu Ichikawa
Publikováno v:
26th International Conference on Indium Phosphide and Related Materials (IPRM).
Low-dark-current InGaAs metal-semiconductor-metal (MSM) photodetectors monolithically integrated with InP photonic-wire waveguides are fabricated on III-V CMOS photonics platform. By using the Schottky barrier enhancement layer consisting of the InP/