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pro vyhledávání: '"Takehiro Fukuyam"'
Autor:
Ichiro Hirosawa, Junichi Onodera, Makiko Irie, Takeshi Iwai, Kazuyuki Horie, Takahiro Kozawa, Seiichi Tagawa, Tomoyuki Koganesawa, Takeyoshi Mimura, Takehiro Fukuyam, Hiroki Yamamoto
Publikováno v:
Journal of Photopolymer Science and Technology. 22:105-109
Films of chemically amplified resists with different polymer polarity and film thickness were prepared to investigate their effect on acid generator distribution within the film. Poly(4-hydroxystyrene) (PHS) was used as a polymer, and its polarity wa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c82bb94e4cae38dcd3b963b6ec6f36b
https://doi.org/10.2494/photopolymer.22.105
https://doi.org/10.2494/photopolymer.22.105
