Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Takeaki Shimanouchi"'
Autor:
Takeaki Shimanouchi
Publikováno v:
Journal of The Japan Institute of Electronics Packaging. 22:459-462
Publikováno v:
Journal of The Japan Institute of Electronics Packaging. 21:662-668
Autor:
Takeaki Shimanouchi, Satoshi Ueda, Tadashi Nakatani, Yoshio Satoh, Anh Tuan Nguyen, Ippei Sawaki, Masahiko Imai
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 126:180-184
This paper describes a novel design of MEMS variable capacitor with high quality factor and wide tuning range. The proposed MEMS variable capacitor is composed of two cross movable electrodes and one dielectric layer between them. The fabrication pro
Publikováno v:
INDIN
A wireless motor condition precise analysis system that uses a highly efficient energy harvester is described in this paper. A continuation data sampling is required for the condition analysis of a motor. We developed the technology that makes a vibr
Publikováno v:
2013 IEEE Radio Frequency Integrated Circuits Symposium (RFIC).
This paper describes a novel design of a MEMS variable capacitor with high operating reliability and high quality factor. Metal-Insulator-Metal (MIM) dots between a fixed electrode and a movable electrode in a variable capacitor is proposed. A Fabric
Autor:
Takashi Katsuki, Fumihiko Nakazawa, Hisao Okuda, Takeaki Shimanouchi, Satoshi Ueda, Osamu Toyoda, Tadashi Nakatani
Publikováno v:
3DIC
This paper presents the effect of frequency of radio frequency microelectromechanical system (RF MEMS) 3D integration with an actual device. A piezoelectric transducer (PZT)-actuated RF MEMS switch that uses a single crystal silicon asymmetric beam w
Autor:
Hiroaki Inoue, Xiaoyu Mi, Satoshi Ueda, Takeaki Shimanouchi, Fumihiko Nakazawa, Takashi Katsuki, Osamu Toyoda, Tadashi Nakatani
Publikováno v:
MRS Proceedings. 1427
This paper presents novel 3D heterogeneous integrations using MEMS Devices for RF applications. We propose a 3D heterogeneous integration method that combines the advantages of LTCC, passive integration, and MEMS technologies. The basic concept is to
Autor:
Masaaki Haneda, Dai Watanabe, Takeaki Shimanouchi, Yoshihiro Sugi, Takanori Mizushima, Noriyoshi Kakuta, Nobuaki Kurioka, Takeaki Hanaoka, Akifumi Ueno
Publikováno v:
Catalysis Today. 16:495-501
Niobium oxide films were prepared over a quartz plate by withdrawing it from a solution of niobium penta-isopropoxide (NIP) dissolved in sec-propyl alcohol. The films calcined at 673 K were well controlled in the film thickness either by NIP concentr
Autor:
Masahiko Kawasaki Imai, Takeaki Shimanouchi, S. Ueda, Tadashi Nakatani, K. Satoh, Anh Tuan Nguyen, Ippei Sawaki
Publikováno v:
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..
This paper describes a novel structure and simple fabrication process for low-loss, low-cost, and high-yield RF-MEMS switches. Our switch has a single crystal silicon (SCS) cantilever, above which are located electroplated bridge electrodes on silico