Zobrazeno 1 - 6 of 6 pro vyhledávání: '"Takayuki Kuwano"'
1
Behavior of hydride species on Si surface during methane plasma irradiation investigated by in-situ infrared spectroscopy
Autor: Takayuki Kuwano, Masanori Shinohara, Michio Niwano, Yasuo Kimura
Publikováno v: Thin Solid Films. 435:13-18
We have investigated the behavior of silicon- and carbon-hydride species on the hydrogen-terminated Si(100) surface, during exposure to hydrogen-diluted methane plasma at room temperature, using infrared absorption spectroscopy (IRAS) in the multiple
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b4adf2e407c6a061d9874374ea1658b0
https://doi.org/10.1016/s0040-6090(03)00367-5
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2
Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated byin situreal-time infrared absorption spectroscopy
Autor: Rikizo Hatakeyama, Takayuki Kuwano, Masanori Shinohara, Yasuo Kimura, Yosuke Akama, Hiroyasu Ishida, Michio Niwano
Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:25-31
We have used infrared absorption spectroscopy (IRAS) in the multiple internal reflection (MIR) geometry to investigate the interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma at room temperature. We have measure
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::05205a1fbf83475d07263ee5a5ea04b3
https://doi.org/10.1116/1.1524146
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