Zobrazeno 1 - 10
of 31
pro vyhledávání: '"Takashi Unagami"'
Autor:
Takahiro AKABANE, Rie NOZAWA, Suzuka KOSUGI, Sayaka KIMURA, Chika SATO, Masayuki ARAI, Takashi UNAGAMI
Publikováno v:
Transactions of Japan Society of Kansei Engineering. 8:691-699
Autor:
Takashi Unagami
Publikováno v:
Journal of The Electrochemical Society. 146:3110-3113
The formation of single‐crystal by a gel method and the electrical conductivity of these crystals are reported. In the high‐temperature region above 245°C, the conduction is intrinsic with an activation energy of 1.70 eV and is controlled by the
Autor:
Takashi Unagami
Publikováno v:
Journal of The Electrochemical Society. 146:1593-1596
This paper presents the results of a chemical vapor deposition study on a new heteroepitaxial system in which highly oriented silicon (Si) films are grown on an evaporated ZnS film/glass substrate. The crystallization of the Si film is stimulated usi
Autor:
Takashi Unagami
Publikováno v:
Journal of The Electrochemical Society. 151:G181
Porous silicon was prepared in a square p + -Si ring formed in an N-type Si epitaxial layer grown on a p-type Si substrate. A sharp notch was generated at the PN junction of the surface during anodization in HF solution. The notch formed at the bound
Autor:
Takashi Unagami
Publikováno v:
Journal of The Electrochemical Society. 149:G539
Boron profiles and interface characteristics of SiO 2 /Si structure when boron was implanted by high energy implantation were studied. A very narrow (∼0.3 μm) channel-stop layer can be formed under a 1.5 μm thick SiO 2 layer by high energy B + im
Rate Determing Step of Anodic Charge-Transfer Process during Porous Silicon Formation in HF Solution
Autor:
Takashi Unagami
Publikováno v:
Japanese Journal of Applied Physics. 36:5421
Anodic reactions for the formation of porous silicon have been examined with regard to the rate determining step of charge-transfer processes. Porous silicon is formed by local silicon dissolution along with both divalent and tetravalent ions. The di
Publikováno v:
Japanese Journal of Applied Physics. 36:L737
The morphology of amorphous silicon (a-Si) thin films prepared by rf diode sputtering was examined. The self-bias potential drops sharply with deceasing argon gas pressure below 30 mTorr and strongly influences the morphology of the sputtered a-Si fi
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 5:1771-1774
Magnetron‐sputtered Ta2O5 films on Si are analyzed for their applications to semiconductor devices. It is clarified that the transition region formed at the Ta2O5/Si interface plays a significant role in determining electrical characteristics. This
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 1:1825-1830
UV‐stimulated photocurrent spectroscopy and photocurrent transient methods have been used to determine the effects of deposition parameters on the electron trapping level density and its energy distribution in rf‐sputtered Ta2O5 films. Results of
Publikováno v:
Journal of The Electrochemical Society. 131:2621-2625