Zobrazeno 1 - 10
of 60
pro vyhledávání: '"Takashi Kamo"'
Autor:
Shunko Magoshi, Satoshi Tanaka, Susumu Iida, Takashi Kamo, Takayuki Uchiyama, Yasutaka Morikawa, Takeshi Yamane
Publikováno v:
Extreme Ultraviolet (EUV) Lithography X.
We report on the reduction of the mask 3D effect in an etched 40-pair multilayer extreme ultraviolet (EUV) lithography mask by measuring the printed ΔCD (horizontal–vertical) on exposure with a high-NA small field exposure tool (HSFET). We compare
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c087f180a3305c18a54f40ce7922141
https://doi.org/10.1117/12.2515273
https://doi.org/10.1117/12.2515273
Publikováno v:
Extreme Ultraviolet (EUV) Lithography X.
Programmed defect masks (PDMs) of a tantalum-based absorber were fabricated by a conventional and improved process that decreased the mask line width roughness (LWR). The improved mask LWR decreased the minimum size of recognizable defects from 18.6
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b7411c235dd5a895349d0afe4b0b8221
https://doi.org/10.1117/12.2515145
https://doi.org/10.1117/12.2515145
Publikováno v:
Extreme Ultraviolet (EUV) Lithography IX.
Printability estimation of blank defects on an extreme ultraviolet (EUV) mask was examined by means of actinic darkfield imaging. A dedicated mask containing 64-nm line and space pattern was fabricated on a blank with known native blank defects. Acti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bff9b20488607964814f15339ab1c86e
https://doi.org/10.1117/12.2297503
https://doi.org/10.1117/12.2297503
Autor:
Akihiko Ando, Masamitsu Itoh, Takashi Hirano, Keiko Morishita, Ryoji Yoshikawa, Takashi Kamo, Masato Naka
Publikováno v:
Photomask Technology.
It is generally said that conventional deep ultraviolet inspection tools have difficulty meeting the defect requirement for extreme ultraviolet masks of hp 1X nm. In previous studies, it has been shown that the newly developed optics and systems usin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::57736e2ee65f132fd478b9f0466ef807
https://doi.org/10.1117/12.2280504
https://doi.org/10.1117/12.2280504
Publikováno v:
Scopus-Elsevier
Most of fishing ports in Hokkaido, Japan are located in the surf zone on the sandy beach. As a result, channel sedimentation has become a serious problem in many fishing ports. As an example, when planning a coastal structure to control littoral drif
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::170d0b8b588581cd464416faa029d49c
https://doi.org/10.9753/icce.v36.sediment.76
https://doi.org/10.9753/icce.v36.sediment.76
Autor:
Takashi Kamo, Ryuichiro Nishi
Publikováno v:
Coastal Engineering Proceedings. :34
It is recognized that links among forests, rivers and sea are important, because biological and fisheries production in the coastal zone is influenced by land-sea interaction. There are several nutrient supply systems in the coastal zone. River runof
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54da1a7fd134882b33887c37e2335aba
https://doi.org/10.9753/icce.v36.currents.34
https://doi.org/10.9753/icce.v36.currents.34
Autor:
Masato Naka, Keisuke Chiba, Ai Kumada, Keiko Morishita, Kosuke Takai, Ryoji Yoshikawa, Yukiyasu Arisawa, Takashi Kamo, Eishi Shiobara, Shingo Kanamitsu
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p111480X-1-111480X-18, 18p
Autor:
Takashi Kamo, Takeshi Yamane, Yasutaka Morikawa, Susumu Iida, Takayuki Uchiyama, Shunko Magoshi, Satoshi Tanaka
Publikováno v:
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109571C-1-109571C-6, 6p
Autor:
Toshihiko Nakamura, Atsushi Yoshida, Daisuke Hatanaka, Michiko Kusakari, Hidehiro Takahashi, Shinji Katsuragi, Shingo Yamada, Takashi Kamohara
Publikováno v:
Practical Laboratory Medicine, Vol 36, Iss , Pp e00327- (2023)
Background: High mobility group box 1 (HMGB-1) has been extensively studied in adults and to a certain extent in neonates as well. Clinical examination of neonates, especially unwell neonates soon after birth, should be minimally invasive. Objective:
Externí odkaz:
https://doaj.org/article/f194c49229644f20a4559a99f738792d
Publikováno v:
SPIE Proceedings.
With shrinking pattern size, mask 3D effects are estimated to become stronger, such as horizontal/vertical shadowing, best focus shifts through pitch and pattern shift through focus. To reduce these mask 3D effects, we have proposed etched multilayer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8be1551e57bddbbef93c0d59093d228b
https://doi.org/10.1117/12.2242872
https://doi.org/10.1117/12.2242872