Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Takaomi Kishimoto"'
Autor:
Kenzo Maehashi, Kazuhiko Matsumoto, Shin Iwasaki, Takaomi Kishimoto, Koichi Inoue, Yasuhide Ohno
Publikováno v:
Journal of Electronic Materials. 39:376-380
Horizontally aligned single-walled carbon nanotubes (SWNTs) were fabricated on patterned SiO2/Si substrates with groove-and-terrace structures, which were obtained using electron-beam lithography and reactive ion etching. Scanning electron microscopy
Publikováno v:
2010 IEEE Nanotechnology Materials and Devices Conference.
We demonstrated high-performance complementary voltage inverters based on top-gated carbon nanotube field-effect transistors (CNTFETs) with SiN x passivation films. The carrier type of CNTFETs was controlled by forming condition of SiN x passivation
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30:03D108
Complementary voltage inverters based on top-gated carbon nanotube field-effect transistors (CNTFETs) were fabricated with SiNx top-gate insulators. The SiNx passivation films were deposited by catalytic chemical vapor deposition, and the carrier typ
Autor:
Kazuhiko Matsumoto, Takaomi Kishimoto, Shin Iwasaki, Yasuhide Ohno, Koichi Inoue, Kenzo Maehashi
Publikováno v:
Japanese Journal of Applied Physics. 49:06GK01
Horizontally aligned single-walled carbon nanotubes (SWNTs) were fabricated on patterned SiO2/Si substrates with groove-and-terrace or half-cylinder structures by electron-beam lithography and reactive ion etching. Scanning electron microscopy observ
Publikováno v:
Japanese Journal of Applied Physics. 49:06GG02
We demonstrated logic gates based on complementary carbon nanotube field-effect transistors (CNT-FETs) with SiN x passivation films deposited by catalytic chemical vapor deposition. The carrier type of CNT-FETs was controlled by forming SiN x passiva