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pro vyhledávání: '"Takanori Sugiki"'
Autor:
Takanori Sugiki, Yoshiaki Inaki
Publikováno v:
Journal of Photopolymer Science and Technology. 14:739-744
Enol ether derivative of poly(6-vinyluracil) was synthesized. The polymer released completely the tent-butyl groups above 190°C and gave poly(6-vinyluracil) which was stable up to 350°C. The resist film as spin coated from chloroform solution conta
Publikováno v:
Journal of Photopolymer Science and Technology. 8:9-10