Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Takamitsu KAKINAGA"'
Publikováno v:
Journal of the Society of Materials Science, Japan. 71:931-935
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88abb7beacaf04638642bb9d8fd36be9
https://doi.org/10.2472/jsms.71.931
https://doi.org/10.2472/jsms.71.931
Autor:
Jan G. Korvink, Yoshitada Isono, K. H. Ehrmann, Noriaki Baba, Osamu Tabata, Takamitsu Kakinaga
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 124:7-13
We propose a new concept for anisotropic single crystalline silicon (Si) etching simulation. Our approach combines three calculation modules, a molecular dynamics calculation module to define chemical reaction probability, a Cellular-Automaton module
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::612ad6bcf0992472b67c0fd3e5461ddc
https://doi.org/10.1541/ieejsmas.124.7
https://doi.org/10.1541/ieejsmas.124.7