Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Takahito Tanibuchi"'
Publikováno v:
Sensors & Materials; 2024, Vol. 36 Issue 8, Part 3, p3407-3418, 12p
Autor:
Momoko Deura, Takeshi Momose, Yukihiro Shimogaki, Jun Yamaguchi, Hiroki Sato, Takahito Tanibuchi, Tomoko Hirabaru, Hayato Kubo
Publikováno v:
Materials Science and Engineering: B. 264:114992
Metastable Al-rich face-centered-cubic (fcc) TiAlN polycrystals have attracted attention as coating materials. However, the mechanism of chemical vapor deposition (CVD) of TiAlN has yet to be clarified. In this study, we performed a kinetic analysis
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fc5bdf5abd0a9c1b348fa1b18c0847a
https://doi.org/10.1016/j.mseb.2020.114992
https://doi.org/10.1016/j.mseb.2020.114992
Publikováno v:
The Proceedings of Conference of Tokai Branch. :123
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d67dce397c47cdafbf105f22521a052
https://doi.org/10.1299/jsmetokai.2019.68.123
https://doi.org/10.1299/jsmetokai.2019.68.123
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 69:602-609
This paper studies elementary and structural effects on mechanical properties of silicon incorporated amorphous hydrogenous carbon films. Fifteen kinds of the carbon films were prepared by plasma-enhanced chemical vapor deposition method of the penni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::560f21cdb82a0bee0cdacf3816445ff2
https://doi.org/10.1299/kikaia.69.602
https://doi.org/10.1299/kikaia.69.602
Publikováno v:
The proceedings of the JSME annual meeting. :297-298
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aaa7fed7766798d0323cd715c047e7c4
https://doi.org/10.1299/jsmemecjo.i.01.1.0_297
https://doi.org/10.1299/jsmemecjo.i.01.1.0_297