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pro vyhledávání: '"Takahiko Uematu"'
Autor:
Takeshi Yasuda, Tomohiro Kobayashi, Isao Nakamura, Kazuo Morikawa, Atsushi Mitsuo, Yoshikazu Teranishi, Masanori Ishizuka, Takahiko Uematu
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 272:458-461
Application of nano and micro fabrication techniques in industry requires solution to some crucial problems. One of the significant problems is the sticking interface between mold surface and imprinted polymer. In this study, we report a solution to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7c1a17e54e9f8b3006af05a5d7896561
https://doi.org/10.1016/j.nimb.2011.01.123
https://doi.org/10.1016/j.nimb.2011.01.123
