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pro vyhledávání: '"Takafumi Ninoseki"'
Publikováno v:
Sensors, Vol 23, Iss 23, p 9557 (2023)
Microelectromechanical systems (MEMS)-based capacitive pressure sensors are conventionally fabricated from diaphragms made of Si, which has a high elastic modulus that limits the control of internal stress and constrains size reduction and low-pressu
Externí odkaz:
https://doaj.org/article/4815d8046a464ac8a651b2ce183db518
