Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Takafumi Hamajima"'
Publikováno v:
AIP Conference Proceedings.
The transition between the capacitively coupled plasma (CCP) and the inductively coupled plasma (ICP) was investigated with the internal radio frequency (RF) multi-turn antenna. The transition between them showed the hysteresis curve. The radiation p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7bd656e726d894e3cb0533347f762df
https://doi.org/10.1063/1.4737570
https://doi.org/10.1063/1.4737570
