Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Takaaki Yoshihara"'
Publikováno v:
THERMEC'2003, PTS 1-5. :333-338
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2c1be18fa02f313f342d20551c1cea88
http://hdl.handle.net/2433/8854
http://hdl.handle.net/2433/8854
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 148:650-654
The atomic bonds in carbon nitride films prepared by CN molecular negative-ion beam deposition were investigated with respect to the dependence on the incident ion energy. Mass-separated CN negative ions were deposited on n-Si(1 0 0) at a low ion ene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a2ba9bfb3792198a28b2f7a0cca7bc32
https://doi.org/10.1016/s0168-583x(98)00818-0
https://doi.org/10.1016/s0168-583x(98)00818-0
Publikováno v:
SHINKU. 42:221-224
Atomic bonding state of carbon-negative-ion beam deposited films was investigated. Mass-separated ions of C- and C-2were deposited on Si (100) and Si (111) at a low ion energy of 50-400 eV under 1 × 10-6 Pa. Deposited films showed a broad Raman band
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d3540199212f51e3d191edf1b1e659e5
https://doi.org/10.3131/jvsj.42.221
https://doi.org/10.3131/jvsj.42.221
Publikováno v:
Review of Scientific Instruments. 69:884-886
A high current CN negative-ion beam was obtained from a radio frequency plasma-sputter-type heavy negative ion source in a target-gas mode operation and CN negative-ion beam deposition was investigated. CN negative ions of 0.88 mA were safely obtaine
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f1b1b9e78695e0ea16cc0d8058da4aae
https://doi.org/10.1063/1.1148628
https://doi.org/10.1063/1.1148628