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Autor:
Tailhades, Lionel Presmanes, Yohann Thimont, Audrey Chapelle, Frédéric Blanc, Chabane Talhi, Corine Bonningue, Antoine Barnabé, Philippe Menini, Philippe
Publikováno v:
Sensors; Volume 17; Issue 5; Pages: 1055
The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been successfully combined wi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=multidiscipl::6d223d32d5a5e7090aa8311144008be6
