Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Taihei Mori"'
Autor:
Taihei Mori, Yosuke Okamoto, Masahiro Oya, Shinji Mizutani, Shinichi Nakazawa, Kotaro Maruyama, Yuichiro Yamazaki
Publikováno v:
Metrology, Inspection, and Process Control XXXVI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cb362c33e83c470b058d5efa0d70373f
https://doi.org/10.1117/12.2615750
https://doi.org/10.1117/12.2615750
Autor:
Taihei Mori, Shinichi Nakazawa, Yuichiro Yamazaki, Seulki Kang, Yosuke Okamoto, Kotaro Maruyama, Akinori Kawamura
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
The precise metrology for edge placement error (EPE) is required especially in EUV era. Last year, we proposed new contour extraction algorithm using machine learning and verified the robustness to SEM noise on AEI pattern. In this study, we suggest
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ee384be15a79f9f2ae2477a7b1e30755
https://doi.org/10.1117/12.2584709
https://doi.org/10.1117/12.2584709