Degradation in polysilicon thin film transistors related to the quality of the polysilicon material

Autor: Bertrand Boudart, Olivier Bonnaud, Taieb Mohammed-Brahim, Boubekeur Tala-Ighil, Jean-François Llibre, H. Toutah

Publikováno v: ESREF 2003; Poster
ESREF 2003; Poster, Oct 2003, Arcachon, France
Microelectronics Reliability
Microelectronics Reliability, Elsevier, 2003, 43 (9-11), pp.1531-1535. ⟨10.1016/S0026-2714(03)00271-3⟩
Microelectronics Reliability, Elsevier, 2003, 43, pp.1531-1535
HAL
Microelectronics Reliability, 2003, 43 (9-11), pp.1531-1535. ⟨10.1016/S0026-2714(03)00271-3⟩
Microelectronics Reliability, 2003, 43, pp.1531-1535

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::991107ecdc5df78181a5350f80d8a7a7
https://doi.org/10.1016/s0026-2714(03)00271-3

Excimer laser annealing system for AMLCDs: a long laser pulse for high-performance, uniform, and stable TFT

Autor: Christophe Prat, Taieb Mohammed-Brahim, Dorian Zahorski, Youri Helen, Olivier Bonnaud

Publikováno v: Flat Panel Display Technology and Display Metrology II.

The excimer-laser-based machine developed by SOPRA for the Low Temperature Poly Silicon (LTPS) exhibit unique characteristics described in the present paper. The machine consists in a laser source, an optical set-up to homogenize the beam and a motio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::94ecea75d1ea396cdb2d03124fe5dbac
https://doi.org/10.1117/12.424884