Výsledky vyhledávání - "Tadashi Kanosue"

Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture

Autor: Naoma Ban, Hiroya Ohta, Tadashi Kanosue, Makoto Sakakibara, Yasunari Sohda

Publikováno v: Japanese Journal of Applied Physics. 46:6166-6170

A highly accurate method for measuring beam properties in a variable-shaped electron beam (VSB) system has been developed. This method is based on a knife-edge method with a solid-state detector (SSD) and scattering apertures. In VSB system, it is ne

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::660a88b36f6cab0bb74ba3b0317f8714
https://doi.org/10.1143/jjap.46.6166

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