Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Tad Grider"'
Autor:
Tad Grider, Steve Heinrich-Barna, John Howard Macpeak, Armando Vigil, Brian Horning, Kelly DeShields, Brian K. Kirkpatrick, Alexander Kotov, C.F. Dunn, N. Do, Kim Jinho, Lyndon Preiss, Jon Nafziger, O'brien Corey Rollin, Viktor Markov, Sean Bo
Publikováno v:
IRPS
In advanced embedded split-gate SuperFlash® 3rd generation technology (ESF3) the select gate is compiled with continually scaled core logic transistors. In doing so, enhanced performance and lower power are achieved. However, it was observed during
Publikováno v:
Microelectronics Reliability. 39:673-679
There are several advanced processes which are being actively studied as candidates for sub-0.25 μm technology. This paper studies the effects on NMOS hot carrier reliability from remote plasma nitrided oxide (RPNO), deuterium anneal and pocket impl
Autor:
Shaofeng Yu, Brian K. Kirkpatrick, O'brien Corey Rollin, Larry Liu, Rajesh Khamankar, Oluwamuyiwa Oluwagbemiga Olubuyide, Deborah J. Riley, Anand T. Krishnan, I. Fujii, C. Machala, Clinton L. Montgomery, Brian Hornung, H. Bu, Yiming Gu, Steven L. Prins, T. Lowry, K. Kirmse, James Walter Blatchford, Tad Grider, C. Bowen, G. Shinn, D. Corum, C. Lin, Tony Tae-Hyoung Kim
Publikováno v:
2008 Symposium on VLSI Technology.
A 45 nm high performance technology with 11 level metallization is presented for SOC applications. High performance and density are maintained through new process optimizations that allow the use of less restrictive layouts by eliminating defect gene
Autor:
Tad Grider, Clinton L. Montgomery, D. Mercer, Freidoon Mehrad, Donald S. Miles, Shaofeng Yu, Richard L. Guldi, B.Y. Lin, Yuqing Xu, Yaw S. Obeng, Sue E. Crank, D. Corum, A. J. Griffin, P J. Chen, F.S. Johnson, D.A. Ramappa, X. Liu, Jiong-Ping Lu, Thomas D. Bonifield, Juanita Deloach, Duofeng Yue, Lance S. Robertson, Lindsey H. Hall
Publikováno v:
2006 International Workshop on Junction Technology.
As CMOS technologies move into the 90nm node and beyond, nickel (Ni) self-aligned silicide (SALICIDE) is transitioning from R&D into mainstream SC fabrication. In this paper, advantages and challenges of Ni SALICIDE process technology will be reviewe
Autor:
Rajesh Khamankar, Joe G. Tran, P.E. Nicollian, Anand T. Krishnan, Melissa M. Hewson, S. Aur, Mark Somervell, James Walter Blatchford, Tad Grider, Lindsey H. Hall, Brian K. Kirkpatrick, D. Farber, Srinivasan Chakravarthi, Benjamen Michael Rathsack, H. Bu, Brian Hornung, Juanita Deloach, Brian A. Smith, Jiong-Ping Lu, C. Kaneshige, April Gurba, C. Bowen, C. Machala, Donald S. Miles, Husam N. Alshareef, M. J. Bevan, P.R. Chidambaram, Vladimir A. Ukraintsev, Ajith Varghese, Hiroaki Niimi
Publikováno v:
Scopus-Elsevier
In this abstract we present a highly manufacturable, high performance 90nm technology with best in class performance for 35nm gate-length N and P transistors. Unique, but simple and low cost, process changes have been utilized to modulate channel str
Autor:
D. Mercer, Melissa M. Hewson, Tad Grider, Clinton L. Montgomery, R. Kuan, L. Tsung, Donald S. Miles, J. Ruan, J. Zhao, April Gurba, C.T. Lin, Jiong-Ping Lu, Y. Xu
Publikováno v:
Digest. International Electron Devices Meeting.
A novel nickel self-aligned silicide (SALICIDE) process technology has been developed for CMOS devices with physical gate length of sub-40 nm. The excess silicidation problem due to edge effect is effectively solved by using a low-temperature, in-sit
Autor:
Rajesh Khamankar, Lancy Tsung, Mark R. Visokay, M. Douglas, A. Shanware, Luigi Colombo, M. J. Bevan, R. T. Laaksonen, R. Kuan, Tad Grider, Haowen Bu, J. McPherson, James J. Chambers, Antonio L. P. Rotondaro
Publikováno v:
2002 Symposium on VLSI Technology. Digest of Technical Papers (Cat. No.01CH37303).
We report for the first time on short channel transistors fabricated using HfSiON, a new high-k gate dielectric material. HfSiON has superior electrical characteristics such as low leakage current relative to SiO/sub 2/, low interfacial trap density,
Autor:
Husam N. Alshareef, Juanita Deloach, M. J. Bevan, C. Bowen, M. Goodwin, P.R. Chidambaram, James Walter Blatchford, Srinivasan Chakravarthi, Tad Grider, Brian K. Kirkpatrick, Rajesh Khamankar, April Gurba, Ajith Varghese, Hiroaki Niimi, Donald S. Miles, Brian A. Smith, Xin Zhang, C. Machala, Jiong-Ping Lu, Lance S. Robertson, G.V. Thakar, Benjamen Michael Rathsack, Brian Hornung, P.E. Nicollian
Publikováno v:
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407).
A 90 nm logic technology is presented featuring an aggressively scaled 37 nm gate length, 1.3 nm EOT plasma nitrided gate dielectric with differential offset spacer and leading edge CV/I performance. NMOS and PMOS transistors have been optimized with
Publikováno v:
1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98.
There are several advanced processes which are being actively studied as candidates for sub-0.25 /spl mu/m technology and beyond. This paper studies the effects on hot carrier reliability from remote plasma nitrided oxide (RPNO), deuterium anneal and
Conference
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