In-TFT-array-process micro defect inspection using nonlinear principal component analysis

Autor: Yung Ting, Chi-Kai Wang, Ching-Shun Chen, Wei-Zhi Lin, Yi-Hung Liu, Jih-Shang Hwang, Zhi-Hao Kang

Publikováno v: International Journal of Molecular Sciences
Volume 10
Issue 10
Pages: 4498-4514
International Journal of Molecular Sciences, Vol 10, Iss 10, Pp 4498-4514 (2009)

Defect inspection plays a critical role in thin film transistor liquid crystal display (TFT-LCD) manufacture, and has received much attention in the field of automatic optical inspection (AOI). Previously, most focus was put on the problems of macro-

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7c4d3f0f9867c346e56fa7cdde5aec18
https://pubmed.ncbi.nlm.nih.gov/20057957

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