Zobrazeno 1 - 3
of 3
pro vyhledávání: '"T.M. Lukhanova"'
Autor:
V.I. Folomeev, I.I. Maronchuk, A.V. Egorov, V.P. Ginkin, V. V. Rakov, A. V. Kartavykh, T.M. Lukhanova
Publikováno v:
Journal of Crystal Growth. 236:551-556
A system and procedure for simultaneously monitoring temperatures along the melt and crystal axis, those on the external surface of the quartz ampoule and in various elements of the “Polyzone” facility's thermal unit have been developed. A detail
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f18661c790f0241ef3ccdaf879010853
https://doi.org/10.1016/s0022-0248(02)00865-5
https://doi.org/10.1016/s0022-0248(02)00865-5
Autor:
O.E. Dnitrieva, Zh.L. Korobitsina, A.A. Shinanskiy, V.A. Schveigert, E.G. Tishkovsky, P.A. Androsenko, A.M. Bekesheva, T.M. Lukhanova, Yu.P. Zhydkov, I.V. Schveigert, A.L. Alexsandrov, G.V. Gadiyak, M.S. Obrekht, V.M. Bedanov, E.E. Dagnan, M.S. Ivanov, V.P. Ginkin
Publikováno v:
COMPEL - The international journal for computation and mathematics in electrical and electronic engineering. 11:445-455
In this paper the MOPIT system for the simulation of devices and manufacturing processes is presented. The MOPIT system is meant for the simulation of the following semiconductor processing : ion implantation of impurities , diffusion , radiation enh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7994eefeef1f0dab2c179e9bb0e7e019
https://doi.org/10.1108/eb010105
https://doi.org/10.1108/eb010105
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