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Autor:
Andrew R.K. Ralston, T.E. Boltshauser, Denice D. Denton, J.M. Funk, H.P. Baltes, Milan C. Buncick
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
Quantifying the effect of moisture on the electrical properties of thin dielectric films requires the use of a model that takes into account the geometry of the test structure and the dielectric properties of the air layer above the device. Using thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b854da361ac238a00a2147a2e6c3d968
https://doi.org/10.1109/sensor.1991.148993
https://doi.org/10.1109/sensor.1991.148993
