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Publikováno v:
Vakuum in Forschung und Praxis. 13:215-220
Autor:
Johannes Windeln, A. Wienss, T. Witke, U. Hartmann, H.-H. Schneider, G. Persch-Schuy, M. Neuhäuser
Publikováno v:
Diamond and Related Materials. 10:1024-1029
Nitrogenated carbon coatings (CN x ) are widely used as protective coatings on magnetic hard disks. In this paper, the mechanical properties of such coatings produced with d.c. magnetron-sputtering and filtered high-current vacuum arcs (HCA) are comp
Publikováno v:
Surface and Coatings Technology. 126:81-88
Special features of the filtered high-current pulsed arc deposition (φ-HCA) are presented in comparison with the conventional dc-arc method. The high-current arc technique allows pulse currents of some kiloamperes and averaged arc currents of approx
Autor:
T. Witke, Bernd Schultrich, H.-J. Scheibe, Jörg Vetter, Peter Siemroth, Otmar Zimmer, Thomas Schuelke
Publikováno v:
Surface and Coatings Technology. :226-232
DC and AC vacuum arc evaporation comprise two techniques currently implemented for thin film deposition, each with specific technical aspects with regard to the discharge systems and their application fields. The DC arc discharge at several 10 A up t
Publikováno v:
Surface and Coatings Technology. :609-613
The principal deposition conditions for the preparation of hard amorphous carbon films with hardness values above 50 GPa are now well known: the high energy of the impinging carbon particles and low deposition temperature. Such conditions are in good
Autor:
J. Jojic, S. Scherrer, Günter Borchardt, B. Schultrich, T. Witke, S. Weber, R. Weiß, Holger Fritze, Claus H. Rüscher
Publikováno v:
Journal of the European Ceramic Society. 18:2351-2364
For an industrial Si-SiC coated C/C material (reference material) the temperature dependence of the linear rate of mass loss is interpreted in the temperature range 773 < T < 1973 K. The Arrhenius plot of the thermogravimetrically determined oxidatio
Publikováno v:
IEEE Transactions on Plasma Science. 23:919-925
The main parameters and dimensions of cathode spots have been under discussion for years. To solve these current questions, a new system was specially designed. The image converting high speed framing camera (HSFC) combines a micrometer lateral resol
Publikováno v:
Surface and Coatings Technology. :713-718
In both pulsed laser deposition (PLD) and vacuum arc deposition (VAD) the target material is evaporated and ionised in an explosive process of some nanoseconds duration. In PLD the explosive evaporation is caused by very high power densities (10 7 to
Autor:
Peter Siemroth, T. Witke
Publikováno v:
Proceedings ISDEIV. 18th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.98CH36073).
A pulsed high current metal ion source that produces a metallic plasma flux was designed and successfully used for film deposition. The plasma flux consists of the fully ionized plasma beam produced by a pulsed high current vacuum arc transported thr