Zobrazeno 1 - 7
of 7
pro vyhledávání: '"T. V. P. Schut"'
Publikováno v:
IEEE sensors journal, 21(5):9277606, 5886-5894. IEEE
In this paper we present a $\mu $ -Coriolis mass flow sensor with differential capacitive readout, which can reduce the effect of common mode vibrations caused by external disturbances. The device consists of two silicon nitride micro-channel loops m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a14243426f4d30f8eaeb44b79fde66b3
https://doi.org/10.1109/jsen.2020.3042078
https://doi.org/10.1109/jsen.2020.3042078
Autor:
Yiyuan Zhao, Meint J. de Boer, Joost Conrad Lötters, Jarno Groenesteijn, Remco J. Wiegerink, T. V. P. Schut, Remco G.P. Sanders, Henk-Willem Veltkamp, Bogdan Breazu
Publikováno v:
Micromachines, Vol 11, Iss 561, p 561 (2020)
Micromachines
Volume 11
Issue 6
Micromachines, 11(6):561. Multidisciplinary Digital Publishing Institute (MDPI)
Micromachines
Volume 11
Issue 6
Micromachines, 11(6):561. Multidisciplinary Digital Publishing Institute (MDPI)
Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::eeed8f780fdb3e74fa9713b237fcb7b2
https://www.mdpi.com/2072-666X/11/6/561
https://www.mdpi.com/2072-666X/11/6/561
Publikováno v:
Microelectronic engineering, 226:111289. Elsevier
In this paper we present μ-Coriolis mass flow sensor devices with improved flow sensitivity. An FEM model is set up which can estimate various parameters of a μ-Coriolis device such as resonance frequency, spring constants and Coriolis forces. Thes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::437b77b5a0a715fe42d1ec2914d992e2
https://research.utwente.nl/en/publications/45fe28b2-fcc3-40c3-82a5-2567f81632cc
https://research.utwente.nl/en/publications/45fe28b2-fcc3-40c3-82a5-2567f81632cc
Publikováno v:
Microelectronic engineering, 224:111236. Elsevier
In this paper we present and compare three different magnet configurations for Lorentz actuation of a μ-Coriolis mass flow sensor. The first configuration consists of 2 cylindrical magnets, the second is based on a Halbach ring, and the third config
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::84f56a3e2a6820ad096aa82ada41bf52
https://doi.org/10.1016/j.mee.2020.111236
https://doi.org/10.1016/j.mee.2020.111236
Publikováno v:
Micromachines
Micromachines, 11(2):184. MDPI
Micromachines, Vol 11, Iss 2, p 184 (2020)
Volume 11
Issue 2
Micromachines, 11(2):184. MDPI
Micromachines, Vol 11, Iss 2, p 184 (2020)
Volume 11
Issue 2
This paper presents a &mu
Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows fo
Coriolis mass flow sensor with resistive readout. Instead of measuring a net displacement such as in a capacitive readout, a resistive readout detects the deformation of the suspended micro-fluidic channel. It allows fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2bc198d37e5aa3c55442dd452d669270
http://www.scopus.com/inward/record.url?eid=2-s2.0-85081229707&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-85081229707&partnerID=MN8TOARS
Autor:
Qinwen Fan, A. C. de Oliveira, Remco J. Wiegerink, T. V. P. Schut, Kofi A. A. Makinwa, Jarno Groenesteijn
Publikováno v:
2019 IEEE Sensors: SENSORS 2019-Conference Proceedings
2019 IEEE Sensors
2019 IEEE Sensors, SENSORS 2019-Conference Proceedings, 2019-October
2019 IEEE Sensors
2019 IEEE Sensors, SENSORS 2019-Conference Proceedings, 2019-October
This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by cu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3ebebf2b3b45130ef4b7c5c5a22bd7ae
https://doi.org/10.1109/sensors43011.2019.8956695
https://doi.org/10.1109/sensors43011.2019.8956695
Autor:
Jarno Groenesteijn, Dennis Alveringh, T. V. P. Schut, Remco J. Wiegerink, Joost Conrad Lötters, Wouter Sparreboom
Publikováno v:
2018 IEEE Micro Electro Mechanical Systems, 218-221
STARTPAGE=218;ENDPAGE=221;TITLE=2018 IEEE Micro Electro Mechanical Systems
STARTPAGE=218;ENDPAGE=221;TITLE=2018 IEEE Micro Electro Mechanical Systems
This paper reports on a fluid viscosity sensor consisting of pressure sensors fully integrated with a Coriolis mass flow sensor. The sensor is capable of measuring viscosities of both liquids and gases through a mathematical model. For liquids, this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1703d8c3f79d7b626f6ce59c4b82371c
https://doi.org/10.1109/memsys.2018.8346523
https://doi.org/10.1109/memsys.2018.8346523