Zobrazeno 1 - 2
of 2
pro vyhledávání: '"T. T. Foxe"'
Publikováno v:
Journal of Vacuum Science and Technology. 19:1394-1397
The reactive gases CBrF3 and CF4 have both been found to be effective in the reactive ion etching of niobium. At relatively high pressures, 100 mTorr, rapid etching with a small degree of undercutting occurs at moderate rf power levels. At lower pres
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12a5713a87694ceffa4f023a5e5da809
https://doi.org/10.1116/1.571217
https://doi.org/10.1116/1.571217
Publikováno v:
Physical Review Letters. 43:169-172
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df1ecb65c0cb332ee31d23091a3a432a
https://doi.org/10.1103/physrevlett.43.169
https://doi.org/10.1103/physrevlett.43.169