Zobrazeno 1 - 10
of 95
pro vyhledávání: '"T. Sarnet"'
Publikováno v:
Electric Power Systems Research. 195:107151
This paper proposes a mathematical model for a distribution level, directly fed core-less, induction furnace that can be used for network voltage behavior related studies performed by the network operators. The objective of the model is to represent
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Publikováno v:
Applied physics. A, Materials science & processing
Applied physics. A, Materials science & processing, Springer Verlag, 2016, 122 (6), ⟨10.1007/s00339-016-0113-9⟩
Applied physics. A, Materials science & processing, 2016, 122 (6), ⟨10.1007/s00339-016-0113-9⟩
Applied physics. A, Materials science & processing, Springer Verlag, 2016, 122 (6), ⟨10.1007/s00339-016-0113-9⟩
Applied physics. A, Materials science & processing, 2016, 122 (6), ⟨10.1007/s00339-016-0113-9⟩
International audience; Grand challenges to create new front metallization techniques in photovoltaic focus considerable attention on laser-induced forward transfer (LIFT) approach. This alternative method aims to overcome the limitations of the well
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0d4eb0a9d0947e3b2e3d0f44369890ed
https://hal.archives-ouvertes.fr/hal-01418503
https://hal.archives-ouvertes.fr/hal-01418503
Publikováno v:
Journal de Physique IV (Proceedings). 138:203-212
Les procedes de recuit et de dopage laser du silicium ont ete etudies de maniere intensive au cours des precedentes decennies. Ces etudes ont d'ores et deja permis un transfert technologique pour la fabrication des semiconducteurs. Cependant les futu
Autor:
Dominique Débarre, J.-L. Santailler, H. Akhouayri, D. Camel, C. Laviron, J. Boulmer, G. Kerrien, J. Venturini, D. Berard, M. Hernandez, T. Sarnet
Publikováno v:
Materials Science and Engineering: B. :105-108
Semiconductor doping is a critical step in microelectronic device fabrication. Particularly, ultra-shallow junction formation for the CMOS 45-nm node is today intensively studied. Laser thermal processing (LTP) has already shown potentiality to achie
Autor:
C. Laviron, J.-L. Santailler, J. Venturini, T. Sarnet, G. Kerrien, M. Hernandez, D. Camel, J. Boulmer
Publikováno v:
Thin Solid Films. :145-149
According to the International Technology Roadmap for Semiconductors (ITRS), source and drain extensions thickness for 65 nm and below technology nodes MOSFET lead to a major challenge. Rapid thermal processing (RTP) tools reach the limit of their ph
Publikováno v:
Thin Solid Films. :106-109
Gas immersion laser doping (GILD) is a very attractive technique to realize the ultra-shallow and highly doped junctions required by the International Technology Roadmap for Semiconductors (ITRS) for future CMOS technologies. In the present work, gas
Autor:
D. Zahorski, Dominique Débarre, T. Sarnet, J. Venturini, J. Boulmer, C. Laviron, M.N. Semeria, M. Hernandez, G. Kerrien
Publikováno v:
Journal de Physique IV (Proceedings). 108:71-74
Cette etude concerne les techniques de recuit laser (LTP) et de dopage laser direct (GILD) de jonctions ultra-minces, necessaires a la fabrication des composants microelectroniques du futur (generations CMOS sub 0,1 μm). Des jonctions de 20 a 80 nm
Autor:
Dominique Débarre, D. Zahorski, G. Kerrien, J.-L. Santailler, C. Laviron, D. Camel, J. Boulmer, M.N. Semeria, J. Venturini, M. Hernandez, T. Sarnet
Publikováno v:
Applied Surface Science. :345-351
In the last few years, laser thermal processing (LTP) has become a potential solution for sub-0.1 μm technology requirements, as focused by the international technology roadmap for semiconductors (ITRS). This paper presents a numerical simulation of
Publikováno v:
Applied Surface Science. 186:145-149
Magneli phases derived from the rutile structure of the TiO2 are of high tribological interest. However, for most industrial applications, this compound should be available in a coating form. Therefore, an innovative process, combining soft processin