Zobrazeno 1 - 3
of 3
pro vyhledávání: '"T. R. Neal"'
Publikováno v:
MRS Proceedings. 495
Amorphous silicon carbide (SiC) was deposited by plasma enhanced chemical vapor deposition (PECVD) in an Applied Materials (AMT5000) tool from sources of trimethylsilane (3MS) and either argon or nitrogen. A deposition rate of ≈ 800 nm/min on a 150
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::620ca6d27af13ab3260fab8eaec79362
https://doi.org/10.1557/proc-495-159
https://doi.org/10.1557/proc-495-159
Autor:
T R, Neal
Publikováno v:
Indiana medicine : the journal of the Indiana State Medical Association. 88(5)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::f88cb3608f157dd33da623d6360bd04b
https://pubmed.ncbi.nlm.nih.gov/7594398
https://pubmed.ncbi.nlm.nih.gov/7594398
Publikováno v:
Topics in health care financing. 13(1)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::e3a3175eccf52ecf5f2e1b8cefbf31c5
https://pubmed.ncbi.nlm.nih.gov/3532426
https://pubmed.ncbi.nlm.nih.gov/3532426