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Autor:
T. Nlarschner, Frans D. Tichelaar, R.T.H. Rongen, JH Joachim Wolter, M.R. Leys, C. A. Verschuren, H Vonk
Publikováno v:
Microelectronics Journal. 28:849-855
We present a study of changes in the layer morphology of tensilely strained GalnAs/InP multiple quantum well (MQW) structures in dependence on strain and substrate off-orientation. Growth was performed by chemical beam epitaxy (CBE). For high tensile