Zobrazeno 1 - 5
of 5
pro vyhledávání: '"T. M. F. Amin"'
Publikováno v:
Journal of Microelectromechanical Systems. 24:1565-1574
In this paper, we present the design, fabrication, and characterization of a long-arm comb-drive actuator with an externally mounted large mirror for optical applications. The provision for an externally mounted mirror can be useful for many optical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5064aa5bd49251df382da091953a19b9
https://doi.org/10.1109/jmems.2015.2423285
https://doi.org/10.1109/jmems.2015.2423285
Publikováno v:
2012 7th International Conference on Electrical and Computer Engineering.
An approach for controlling sidewall smoothness through deep reactive ion etch (DRIE) was developed for silicon micro-optical applications. The process relies on carefully controlled over-passivation of the etched sidewall during the etch/passivation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ce903836c04b05ab18e5e877a11a323d
https://doi.org/10.1109/icece.2012.6471490
https://doi.org/10.1109/icece.2012.6471490
Publikováno v:
SPIE Proceedings.
Rotary comb-drive electrostatic actuators with virtual pivotal point of rotation were designed and fabricated for their application in external cavity tunable lasers in Littman configuration. Silicon on insulator (SOI) wafers with device layer thickn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::69b37b125c351b2a4c5f8bcc35ad6c21
https://doi.org/10.1117/12.930028
https://doi.org/10.1117/12.930028
Publikováno v:
SPIE Proceedings.
Rotary comb-drive electrostatic actuators with smooth vertical sidewalls were designed and fabricated for photonic applications. Silicon on insulator (SOI) wafers with device layer thicknesses of up to 100 μm and oxide layers of 1-2 μm were used. S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::98e74bb2e0b91c9dfcc44254b1d80fb3
https://doi.org/10.1117/12.909647
https://doi.org/10.1117/12.909647
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 11:023012-1
Rotary comb-drive electrostatic actuators with smooth vertical sidewalls were designed and fabricated for photonic applications. Silicon on insulator wafers with device layer thicknesses of up to 100 μm and oxide layers of 1 to 2 μm were used. Stru
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2219a481b5e7fd8df5f378532a37c68d
https://doi.org/10.1117/1.jmm.11.2.023012
https://doi.org/10.1117/1.jmm.11.2.023012