Repairing of Cr-photo-mask by ultrafast- pulse laser

Autor: Hiroko Okuyama, Motoki Watanabe, Mamoru Okutomi, Masanao Tani, Takeyo Tsukamoto, Takeyoshi Nakayama, Yuki Kondo, Masaru Sugirua, S. Oyama, Y. Kawasaki, Satoshi Ihara, N. Morirnoto, A. Yokotani, M. Tomita, Quan Li, S. Kubodera, H. Takakusaki, Yoshihisa Uchida, Toshio Goto, Tatuya Kyotani, Jianrong Qiu, H. Yanagita, Keiu Tokumura, Masataka Murahara, Katsunori Tsunoda, Jun Yamada, Hirotaka Nakayama, Nobuyuki Takahashi, Akira Obara, Noriaki Nishi, Nobuo Ando, Nobuo Isii, T. Hashidume, S. Yosihara, Zhengxin Liu, K. Sugioka, Takashi Inoue, K. Miura, Shigeru Yamaguchi, Tetsuya Hattori, H. Matsuno, T. Ikagame, Kouji Higashikawa, Xiaoyang Zeng, Takeshi Sasaki, Jun Kamiiisaka, H. Sano, Hideo Furuhashi, Y. Kawakami, Mineo Hiramatu, Tetukazu Tanaka, Hirofumi Yajima, T. Kawashima, A. Masagaki, Takashi Obara, Sadao Fujii, T. Mori, Takuya Takasaki, Y. Mase, Kozo Yasuda, Yoshiyuki Uchida, M. Ishii, Takenari Mori, Y. Shinto, K. Kadota, Kunimitsu Takahashi, Hiromi Kawase, Takahisa Jitsuno, Masayuki Okoshi, J. Kawanaka, Naoto Koshizaki, Hitoki Yoneda, N.B. Dahotre, H. Ashizawa, Kenichi Ueda, Shigeto Kobayashi, Tomoo Fujioka, Akinori Kaji, T. Hirayama, Nobuo Yasunaga, K. Makino, Masafumi Ito, Akihiro Kono, R. Nomura, Hikaru Kouta, Hideyuki Horisawa, Chobei Yamabe, Kazuyuki Akagawa, Shinji Motokoshi, Tadahiro Ishii, Kazuyuki Hirao, Naoshige Hayashi, J. Nakata, N. Takezoe, S. Ito, Hiroyuki Niino, Mitsugu Hanabusa, J. Morimoto, Keiji Fuse, Yukinori Hato, Sachiko Umeda, Satoru Nishio, Koichi Toyoda, Naokatsu Yamamoto, Y. Minami, T. Kubota, Yukio Nakajima, Hiroyasu Sato, Masaru Hori, H. Takai, Nobuhiro Akasaka, Hiroshi Ito, E. Ozawa, Takeshi Okada, Kazuyoshi Tanaka, W. Sasaki, Mikio Muro, K. Midorikawa, Tsuguru Shirakawa, M. Hasegawa, T. Suzuki, Saburoh Satoii, Masahiro Nakatsuka, Masayuki Nakamura, T. Igarashi, Shigenori Kuriki, Keiji Ebata, Tadatake Sato, Shinnosuke Nozaki, Manabu Shiozaki, K. Suzuki, Kazushi Fujita, K. Hirobe, T. Mitsuyu, H. Iizuka, Hironari Mikata, Koichi Tsukamoto, K. Obata, K. Kurosawa, K. Kumagai, Masashi Ishimine, Takashi Fushimi, Shigeru Semura, T. Sato, Akira Yabe, Koichi Sasaki, Kazuyuki Okada, S. Nakjima, Y. Maezono, Akiyoshi Matsuzaki

Publikováno v: The Review of Laser Engineering. 27:73-77,80

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::49b994848da5b54c991ec1a8c436238e
https://doi.org/10.2184/lsj.27.supplement_73