Zobrazeno 1 - 3
of 3
pro vyhledávání: '"T. A. Kruze"'
Publikováno v:
Physica Status Solidi (a). 36:81-88
The structure of surface silicon layers heavily irradiated with nitrogen ions depending on dose and subsequent annealing temperature is investigated by transmission electron microscopy. It is shown that in the absence of annealing the produced Si3N4
Publikováno v:
Chemischer Informationsdienst. 6
Publikováno v:
Chemischer Informationsdienst. 6