Výsledky vyhledávání - "T. B. Casserly"

Akademický článek

Effect of Substrate Temperature on the Plasma Polymerization of Poly(methyl methacrylate)The authors thank Novellus and the Semiconductor Research Corporation for fellowship funding and the National Science Foundation/Semiconductor Research Corporation Engineering Research Center for Environmental Benign Semiconductor Manufacturing for funding support.

Autor: T. B. Casserly, K. K. Gleason

Publikováno v: Chemical Vapor Deposition; Jan2006, Vol. 12 Issue 1, p59-66, 8p

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