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Low-temperature deposition of titanium nitride films from dialkylhydrazine-based precursors

Autor: Peggy J. McKarns, Charles H. Winter, Joseph T. Scheper, T. Suren Lewkebandara

Publikováno v: Materials Science in Semiconductor Processing. 2:149-157

The deposition of titanium nitride films from single-source precursors bearing alkylhydrazine-derived ligands is reported. The complex [Ti2Cl4(NN(CH3)2)2(NH2N(CH3)2)2] sublimes at 140–150°C (0.1 mmHg) and affords titanium nitride films in a chemic

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3b410b185883e44db4dec7763646ce6a
https://doi.org/10.1016/s1369-8001(99)00012-8

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Adducts of Titanium Tetrachloride with Alkylselenium Compounds: Molecular Precursors to Titanium Diselenide Films

Autor: a T. Suren Lewkebandara, a Charles H. Winter, a Peggy J. McKarns, b Glenn P. A. Yap, b Louise M. Liable-Sands, b and Arnold L. Rheingold

Publikováno v: Inorganic Chemistry. 37:418-424

Treatment of titanium tetrachloride (2 equiv) with dimethyl diselenide or diethyl diselenide (1 equiv) in hexane at 0 degrees C, followed by crystallization at -20 degrees C, afforded (TiCl(4))(2)(Se(2)(CH(3))(2)) (78%) and (TiCl(4))(2)(Se(2)(CH(2)CH

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0305264b8807b213aa007849d1eae24c
https://doi.org/10.1021/ic970945q

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Terminal and Bridging Imido Complexes from Titanium Tetrachloride and Primary Amines. Implications for the Chemical Vapor Deposition of Titanium Nitride Films

Autor: T. Suren Lewkebandara, Philip H. Sheridan, Charles H. Winter, Arnold L. Rheingold, Mary Jane Heeg

Publikováno v: Inorganic Chemistry. 33:5879-5889

Tert-Butylamine reacts with titanium tetrachloride to produce [TiCl{sub 2}(NtBu)(NH{sub 2}tBu){sub 2}]{sub 3} at 90% yield. Upon changing solvents, a second treatment tert-butylamine converts the first complex to [TiCl{sub 2}(NtBu)(NH{sub 2}tBu){sub

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::364a4d5cb369697a8d86739a76fd25ab
https://doi.org/10.1021/ic00103a041

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A single-source precursor to titanium nitride thin films. Evidence for the intermediacy of imido complexes in the chemical vapor deposition process

Autor: T. Suren Lewkebandara, Philip H. Sheridan, Mary Jane Heeg, James W. Proscia, Charles H. Winter

Publikováno v: Journal of the American Chemical Society. 114:1095-1097

Monomeric titanium and zirconium complexes with multiple bonds to oxygen, sulfur, and nitrogen have attracted considerable attention due to their novel structural features and interesting reactivity. Recently, we have initiated a research program tha

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c985a4056463474dfa726cbf24be9a19
https://doi.org/10.1021/ja00029a053

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Automotive Applications of Materials Prepared by Ceramic Precursor and Sol-Gel Routes

Autor: Pawel Czubarow, Chaitanya K. Narula, A. Gandopadhyay, L. F. Allard, P. Schmitz, Mark P. Everson, C. H. Winter, A. Varshney, T. Suren Lewkbandara, Dietmar Seyferth

Publikováno v: MRS Proceedings. 495

The promise of new applications continues to drive research on ceramic precursor and sol-gel routes to materials preparation. These routes offer flexibility in the fabrication of materials in forms such as films, coatings, fibers, foams, and powders,

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::09d729d83ff7bb79c7de3ddf30b4cdb2
https://doi.org/10.1557/proc-495-287

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