Zobrazeno 1 - 4
of 4
pro vyhledávání: '"T J Dalton"'
Publikováno v:
Journal of The Electrochemical Society. 140:2395-2401
The formation of microtrenches in polysilicon plasma etching over thin gate oxides has been observed and modeled Microtrenches are small trenches formed in the bottom of etching features and are caused by the localized breakthrough of the gate oxide
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5c3d2f477f6faba081c331affd0fadc
https://doi.org/10.1149/1.2220831
https://doi.org/10.1149/1.2220831
Publikováno v:
American Journal of Epidemiology. 82:197-207
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3590a4b44dcd8b31323e37d2e9bfba76
https://doi.org/10.1093/oxfordjournals.aje.a120544
https://doi.org/10.1093/oxfordjournals.aje.a120544
Autor:
T J, Dalton
Publikováno v:
Hospital financial management. 30(4)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::5a32860ff500cf8840c5fc2fd528d774
https://pubmed.ncbi.nlm.nih.gov/10236405
https://pubmed.ncbi.nlm.nih.gov/10236405
Publikováno v:
American journal of epidemiology. 82(2)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::f111d4f61bb32443d19fac92ae0e5407
https://pubmed.ncbi.nlm.nih.gov/5827173
https://pubmed.ncbi.nlm.nih.gov/5827173