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Development of a Web-Services-Based e-Diagnostics Framework for Semiconductor Manufacturing Industry
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 18:122-135
Recently, the emerging Web-Services technology has provided a new and excellent solution to the data integration among heterogeneous systems. A Web-Services-based e-diagnostics framework (WSDF) is proposed. It can achieve the automation of diagnostic
Publikováno v:
ICRA
In recent years, the emerging Web-services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this paper, a Web-services-based e-diagnostics framework (WSDF) is proposed. It can achieve the au
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing; Feb2005, Vol. 18 Issue 1, p122-135, 14p
Publikováno v:
2003 IEEE International Conference on Robotics & Automation (Cat. No.03CH37422); 2003, p596-596, 1p