Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Sz. Kátai"'
Publikováno v:
Diamond and Related Materials. 11:519-522
It is well known that a secondary plasma is created during the late period of the bias enhanced nucleation (BEN) process, which ultimately affects the quality (texture, morphology) of the deposited layer in an unfavourable manner. Our earlier ion bea
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e72d751b63244fd4e4b198b2dd2fbfd
https://doi.org/10.1016/s0925-9635(02)00027-4
https://doi.org/10.1016/s0925-9635(02)00027-4
Publikováno v:
Diamond and Related Materials. 9:317-321
Ion beam mass spectrometry was used for in situ, real-time, mass-selective energy analysis of the incoming ions during bias-enhanced nucleation in microwave plasma chemical vapor deposition of diamond. H + y and C x H + y fluxes versus energy have be
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf1ac8fe64568723836732b7f8adea33
https://doi.org/10.1016/s0925-9635(99)00216-2
https://doi.org/10.1016/s0925-9635(99)00216-2
Publikováno v:
Vacuum. 56:39-43
Ion beam mass spectrometer (IBMS) has been developed for in situ, real-time monitoring of the ion composition of a plasma in the vicinity of the substrate surface up to a pressure of 100 mbar. IBMS is a quadruple mass spectrometer-based plasma sampli
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::022444e99cdb5d2dc465df4bdc9d1999
https://doi.org/10.1016/s0042-207x(99)00173-6
https://doi.org/10.1016/s0042-207x(99)00173-6
Publikováno v:
Journal of Applied Physics. 86:5549-5555
In situ, real-time, mass selective energy analysis of the incoming ions has been carried out during bias enhanced nucleation for diamond chemical vapor deposition. The dependence of ion energies and fluxes as a function of the bias voltage and CH4 co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2fe254488d63ab39673f38f1fcd80201
https://doi.org/10.1063/1.371559
https://doi.org/10.1063/1.371559
Publikováno v:
Review of Scientific Instruments. 70:3324-3328
Ion beam mass spectrometry (IBMS) has been developed for in situ, real-time monitoring of the ion composition of a plasma in the vicinity of the substrate surface up to a pressure of 50 mbar. Our system was designed for the specific case of diamond d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::27708cbf36e6afedd72ce57e15fbbb17
https://doi.org/10.1063/1.1149912
https://doi.org/10.1063/1.1149912
Publikováno v:
Scopus-Elsevier
Interference patterns from overlapping beams of an intense pulsed laser are used to realize high-resolution thermal processing for direct structuring of semiconductor films. Line and dot arrays have been realized, with periods down to 130 nm. In AlGa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6194cb3143d24d771ba1d92ae98929cd
https://doi.org/10.1002/(sici)1521-396x(199804)166:2<651::aid-pssa651>3.0.co
https://doi.org/10.1002/(sici)1521-396x(199804)166:2<651::aid-pssa651>3.0.co
Publikováno v:
Diamond and Related Materials. 6:1633-1637
The time evolution of diamond film nucleation and growth have been investigated by spectroscopic ellipsometry (SE). Rutherford backscattering spectrometry (RBS) combined with elastic recoil detection (ERD) techniques. Diamond films were prepared usin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aac6b7c80b7069f74182a3e1bd8057cb
https://doi.org/10.1016/s0925-9635(97)00029-0
https://doi.org/10.1016/s0925-9635(97)00029-0
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