Zobrazeno 1 - 1
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pro vyhledávání: '"Syunji Masumori"'
Autor:
Masaru Itakura, Yoshitsugu Tomokiyo, Masanobu Miyao, Taizoh Sadoh, Noriyuki Kuwano, Syunji Masumori, Tomohisa Ohta, Hiroshi Kanno
Publikováno v:
Thin Solid Films. 508:57-60
Ni metal-induced lateral crystallization (Ni-MILC) of amorphous Si 0.6 Ge 0.4 thin films has been investigated by means of scanning electron microscopy and transmission electron microscopy. A pattern of Ni about 5 nm thick was fabricated to cover sel