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pro vyhledávání: '"Syuichi Noda"'
Autor:
Hisataka Hayashi, Katsuyuki Ito, Masami Inoue, Hideo Nakagawa, Syuichi Noda, Satoshi Morishita, Mitsuru Okigawa, Makoto Sekine
Publikováno v:
Japanese Journal of Applied Physics. 41:319-325
Radial and axial distributions of CF and CF2 radical densities in CHF3/Ar inductively coupled plasma (ICP) generated by a radio frequency of 13.56 MHz were evaluated using laser-induced fluorescence (LIF). The radical densities in the bulk plasma wer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6cd34545df93a9daf6d8608468b9825e
https://doi.org/10.1143/jjap.41.319
https://doi.org/10.1143/jjap.41.319
Autor:
Kinya Ashikaga, Yoshio Yamashita, Shinji Tsuboi, Tsuneaki Ohta, Masanori Kasai, Hiroshi Hoga, Syuichi Noda
Publikováno v:
Scopus-Elsevier
We have developed a technique for improving X-ray irradiation stability of silicon nitride (SiN) X-ray mask membrane using H+ implantation. This technique can realize the reduction of X-ray irradiation-induced pattern displacement to less than 20 nm
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b9dcf186f34002623e31726c7cd9b8ca
http://www.scopus.com/inward/record.url?eid=2-s2.0-0029518043&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-0029518043&partnerID=MN8TOARS
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