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Autor:
Syota Kaihatsu, Hiroyuki Katsumata, Tsuyoshi Morita, Daiki Hoshino, Takayuki Fujiya, Yasushiro Nishioka, Yutaka Chida
Publikováno v:
Sensors and Actuators A: Physical. 169:367-372
A silicon linear microactuator driven by the electrochemomechanical strain of polypyrrole was fabricated using silicon microfabrication processes and galvanostatic electropolymerization of a polypyrrole thin film using a methyl benzoate electrolyte s