Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Sylvain Rioufrays"'
Autor:
Roswitha Altmann, Arnaud Favre, Sylvain Rioufrays, Andreas Leibold, Michael Otto, Lothar Pfitzner, R. Dell'Anna, Salvatore Gennaro, Roberto Canteri
Publikováno v:
Solid State Phenomena. 187:299-302
The effectiveness of a FOUP (Front Opening Unified Pod) conditioning test bench was tested with respect to the reduction of outgassing materials from FOUP materials and cleanroom compatibility. The equipment uses vacuum and heat to reduce volatile or
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37161e0ae93b70c12b64af4dc19a38e0
https://doi.org/10.4028/www.scientific.net/ssp.187.299
https://doi.org/10.4028/www.scientific.net/ssp.187.299
