Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sylke Philipp"'
Autor:
Peter Weidner, Thomas Hingst, Alexander Kasic, Thomas Marschner, Sylke Philipp, Manfred Moert, Carsten Ehlers
Publikováno v:
SPIE Proceedings.
For future technology nodes, highly accurate dimensional metrology will become more and more important. At this stage, measuring layer thickness in planar test structures or geometrical dimensions in simplified proxy structures may be not sufficient
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9691c2eae453de950952bcd3c2bd689f
https://doi.org/10.1117/12.814534
https://doi.org/10.1117/12.814534
Autor:
Andreas Heidelberg, Xiaoguang Wu, Sylke Philipp, Peter Weidner, Peter Kücher, Harald Bloeß, David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula
Publikováno v:
AIP Conference Proceedings.
The direct depth measurement of structures with aspect ratios between 1 and 4 in the arrays of memory cells represents a major challenge for inline metrology. For 75 nm and larger technology nodes these measurements are carried out using inline AFM u
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1d3b69f2531acec819d66715ba264ac6
https://doi.org/10.1063/1.2799434
https://doi.org/10.1063/1.2799434