Výsledky vyhledávání - "Switched-mode power Converter"

Akademický článek

High-Power Closed-Loop SMPC-Based Photovoltaic System Characterization under Varying Ambient Conditions

Publikováno v: Energies, Vol 14, Iss 17, p 5296 (2021)

Photovoltaic energy generation potential can be tapped with maximum efficacy by characterizing the source behaviour. Characterization refers to the systematic terminal measurement-based PV modeling which can further facilitate output prediction and f

Externí odkaz: https://doaj.org/article/88405b3503344db5bf25ee2d6727487d

Zobrazit plný text záznamu

Plný text ve formátu HTML

Accurate Ion Energy Control in Plasma Processing by Switched-Mode Power Converter

Autor: Qihao Yu, Erik Lemmen, Korneel Wijnands, Bas Vermulst

Publikováno v: 2022 International Power Electronics Conference, IPEC-Himeji 2022-ECCE Asia, 498-505
STARTPAGE=498;ENDPAGE=505;TITLE=2022 International Power Electronics Conference, IPEC-Himeji 2022-ECCE Asia

Plasma processing, such as plasma deposition and etching, requires accurate control of the plasma ion energy. It can be realized by biasing the reactor table with a tailored voltage waveform. Switched-mode power converters can be used to generate the

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f0a99aa25e8e83f0458a143c0a536d63
https://research.tue.nl/nl/publications/7c411987-c44f-4dc0-ae28-7625a01473e6

Zobrazit plný text záznamu

Equivalent electric circuit model of accurate ion energy control with tailored waveform biasing

Autor: Qihao Yu, Erik Lemmen, Bas Vermulst, Adriaan J M Mackus, Wilhelmus M M (Erwin) Kessels, Korneel Wijnands

Publikováno v: Plasma Sources Science and Technology, 31(3):035012. Institute of Physics

For atomic scale plasma processing involving precise, (an)isotropic and selective etching and deposition, it is required to precisely control the energy of the plasma ions. Tailored waveforms have been employed to bias the substrate table to accurate

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07930c540cecdf15d0bdc8b2a0d01bae
https://doi.org/10.1088/1361-6595/ac4c27

Zobrazit plný text záznamu

Auto-Tuning Control of a Switched-Mode Power Converter for Tailored Pulse-Shape Biased Plasma Etching Applications

Autor: Korneel Wijnands, Erik Lemmen, Bas Vermulst, Qihao Yu

Publikováno v: 2021 IEEE Energy Conversion Congress and Exposition, ECCE 2021-Proceedings, 5949-5954
STARTPAGE=5949;ENDPAGE=5954;TITLE=2021 IEEE Energy Conversion Congress and Exposition, ECCE 2021-Proceedings

For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shaped voltage waveform to bias the reactor table. The bias waveform is divided into an et

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::24ae78db900802793cd4dea4a5684a0e
https://doi.org/10.1109/ecce47101.2021.9595672

Zobrazit plný text záznamu

High-Power Closed-Loop SMPC-Based Photovoltaic System Characterization under Varying Ambient Conditions

Autor: Vinod John, Pallavi Bharadwaj

Publikováno v: Energies, Vol 14, Iss 5296, p 5296 (2021)
Energies
Volume 14
Issue 17

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::df201841e782f7dcd38a15e0f3bf446e
https://www.mdpi.com/1996-1073/14/17/5296

Zobrazit plný text záznamu

Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

Autor: Qihao Yu, Erik Lemmen, Bas Vermulst, C. G. E. Wijnands

Publikováno v: 12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021), 568-573
STARTPAGE=568;ENDPAGE=573;TITLE=12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021)

For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b64fe4c637b0ca00d8d77a3c11fb2c3a
https://research.tue.nl/en/publications/4744a83f-d1d4-4679-b272-3b53d9f34b30

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání