Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Sven Teichert"'
Autor:
Tim Kaeseberg, Sven Teichert, Thomas Siefke, Stefanie Kroker, Bernd Bodermann, Matthias Wurm, Jana Grundmann
Publikováno v:
Optical Technology and Measurement for Industrial Applications Conference 2021.
Spectroscopic polarization measurement and control using channeled spectrum has several unique features and is useful for various spectroscopic instruments. It utilizes the strong dispersion characteristics in polarization retardation of high-order r
Publikováno v:
Modeling Aspects in Optical Metrology VII.
Spectroscopic ellipsometry is a versatile tool to measure dimensional or optical parameters of surface layers or surface structures. The determination of these parameters requires to solve an inverse problem. This is achieved by a fitting procedure,
Publikováno v:
Measurement Science and Technology. 31:115010
There are some commonly-used optimization techniques for the analysis of measured data in spectroscopic Mueller matrix ellipsometry (MME) used, for example, to calculate the layer thicknesses of samples under test. Concentrating on the metrological a
Publikováno v:
Optics Express. 28:8108
In this paper, we focus on the metrological aspects of spectroscopic Mueller ellipsometry—i.e. on the uncertainty estimation of the measurement results. With the help of simulated Mueller matrices, we demonstrate that the commonly used merit functi
Publikováno v:
SPIE Proceedings.
The effects of goniochromatism and sparkle are gaining more and more interest for surface refinement applications driven by demanding requirements from such different branches as automotive, cosmetics, printing and packaging industry. The common back