Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Sven Kirbach"'
Autor:
Sukhrob Abdulazhanov, Maximilian Lederer, C. Mart, Konrad Seidel, Lukas M. Eng, David Lehninger, Ricardo Olivo, Sven Kirbach, Thomas Kampfe
Publikováno v:
physica status solidi (RRL) – Rapid Research Letters
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0a2c2fcdabe83607fa0c14766d26587c
https://doi.org/10.1002/pssr.202100086
https://doi.org/10.1002/pssr.202100086
Autor:
Sven Kirbach, C. Mart, Malte Czernohorsky, Wenke Weinreich, Maximilian Lederer, Sophia Eßlinger, T. Wallmersperger
Publikováno v:
Applied Physics Letters. 118:012904
Piezoelectric thin films are of current interest in science and industry for highly integrated nano-electro-mechanical-systems and sensor devices. In this study, the dependence of the piezoelectric properties on the doping concentration in Si:HfO2 th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37aa8dd0619fd5fb85fb2c517b53a0ac
https://doi.org/10.1063/5.0026990
https://doi.org/10.1063/5.0026990
Autor:
R. Hoffmann, C. Mart, Thomas Kampfe, Malte Czernohorsky, Wenke Weinreich, Sophia Eßlinger, Kati Kühnel, Sven Kirbach, Lukas M. Eng
Publikováno v:
Advanced Electronic Materials. 6:1901015
The in‐plane piezoelectric response of 20 nm thick Si‐doped HfO2 is examined by exploiting thermal expansion of the substrate upon rapid temperature cycling. The sample is heated locally by a deposited metal film, and the subsequently registered
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8eb7785bfedeb0b583359625a3303637
https://doi.org/10.1002/aelm.201901015
https://doi.org/10.1002/aelm.201901015
Autor:
L. Roy, C. Mart, Sven Kirbach, Konrad Seidel, P. Polakowski, Maximilian Lederer, Ricardo Olivo, Thomas Kampfe, David Lehninger, Tarek Ali
Publikováno v:
Appl. Phys. Lett.
The local crystal phase and orientation of ferroelectric grains inside TiN/Hf0.5Zr0.5O2/TiN have been studied by the analysis of the local electron beam scattering Kikuchi patterns, recorded in transmission. Evidence was found that the ferroelectric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6a0989c59bbb1d909ef7794532c512c6
https://doi.org/10.1063/1.5129318
https://doi.org/10.1063/1.5129318