Zobrazeno 1 - 1
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pro vyhledávání: '"Sven Holinksi"'
Publikováno v:
physica status solidi (a). 212:1817-1822
The degradation of thin passivation films on silicon wafers after sputtering deposition with different process parameters has been investigated. Thin intrinsic amorphous silicon passivation films with different thicknesses and with different doped to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4584feba8f292e24475f4df987a6b39a
https://doi.org/10.1002/pssa.201431923
https://doi.org/10.1002/pssa.201431923
